@book{228497,
	author = {Saddow, Stephen E. and ProQuest (Firm)},
	title = {Advances in silicon carbide processing and applications},
	publisher = {Artech House,},
	year = {c2004.},
	series = {Semiconductor materials and devices series},
	address = {Boston :},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=227682}
}