@book{256364,
	author = {Tabata, Osamu. and ProQuest (Firm)},
	title = {Reliability of MEMS},
	publisher = {Wiley-VCH,},
	year = {2013.},
	series = {Advanced micro & nanosystems},
	address = {Weinheim :},
	note = {First edition 2007.},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=481344}
}