Reliability of MEMS
testing of materials and devices
Tabata, Osamu.
Tsuchiya, Toshiyuki.
ProQuest (Firm)
text
bibliography
Electronic books.
gw
Weinheim
Wiley-VCH
2013
monographic
eng
xx, 303 p. : ill.
edited by Osamu Tabata, Toshiyuki Tsuchiya.
First edition 2007.
Includes bibliographical references and index.
Microelectromechanical systems
Reliability
TK7875 .R45 2013
539.60113
Advanced micro & nanosystems
9783527675036
https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=481344
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EBC481344
eng