TY  - BOOK
AU  - Tabata,Osamu
AU  - Tsuchiya,Toshiyuki
ED  - ProQuest (Firm)
TI  - Reliability of MEMS: testing of materials and devices 
T2  - Advanced micro & nanosystems
SN  - 9783527675036
AV  - TK7875 .R45 2013
U1  - 539.60113 23
PY  - 2013///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Reliability
KW  - Electronic books
N1  - First edition 2007; Includes bibliographical references and index
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=481344
ER  -