01570nam a2200409 a 4500001001000000003000700010005001700017006001900034007001500053008004100068020003600109020002700145035002200172035002300194035002500217035002300242035002100265040004100286050002200327082001800349245013000367260003400497300002300531490003300554500002400587504005100611590014700662650005700809655002900866700002700895700003300922710002800955797002000983830004201003856009601045999001901141EBC481344MiAaPQ20250821110321.0m     o  d |      cr cnu||||||||130410s2013    gw a    ob    001 0 eng d  a9783527675036q(electronic bk.)  z9783527335015q(print)  a(MiAaPQ)EBC481344  a(Au-PeEL)EBL481344  a(CaPaEBR)ebr10682369  a(CaONFJC)MIL194693  a(OCoLC)264717029  aMiAaPQbengerdaepncMiAaPQdMiAaPQ 4aTK7875b.R45 20130 a539.6011322300aReliability of MEMSh[electronic resource] :btesting of materials and devices /cedited by Osamu Tabata, Toshiyuki Tsuchiya.  aWeinheim :bWiley-VCH,c2013.  axx, 303 p. :bill.1 aAdvanced micro & nanosystems  aFirst edition 2007.  aIncludes bibliographical references and index.  aElectronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 0aMicroelectromechanical systemsxReliability.9243658 4aElectronic books.9351421 aTabata, Osamu.92436591 aTsuchiya, Toshiyuki.92436602 aProQuest (Firm)92436612 aProQuest (Firm) 0aAdvanced micro & nanosystems.924366240uhttps://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=481344zClick to View  c256364d256364