@book{271881,
	author = {Asundi, Anand. and ProQuest (Firm)},
	title = {Digital holography for MEMS and microsystem metrology},
	publisher = {Wiley,},
	year = {2011.},
	series = {The Wiley microsystem and nanotechnology series},
	address = {Chichester, West Sussex, U.K. ;},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=697681}
}