Digital holography for MEMS and microsystem metrology  [electronic resource] / 
edited by Anand Asundi. 
 - Chichester, West Sussex, U.K. ;  Hoboken, N.J. :  Wiley,  2011. 
 - xxii, 205 p. :  ill., port. 
 - The Wiley microsystem and nanotechnology series .
 - Wiley microsystem and nanotechnology series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781119997306 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Measurement.<br/>Microelectronics--Measurement.<br/>Holographic testing.<br/>Image processing--Digital techniques.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .D54 2011 
<br/><br/><label>Dewey Class. No.: </label>621.381