TY  - BOOK
AU  - Asundi,Anand
ED  - ProQuest (Firm)
TI  - Digital holography for MEMS and microsystem metrology
T2  - The Wiley microsystem and nanotechnology series
SN  - 9781119997306
AV  - TK7875 .D54 2011
U1  - 621.381 22
PY  - 2011///
CY  - Chichester, West Sussex, U.K., Hoboken, N.J.
PB  - Wiley
KW  - Microelectromechanical systems
KW  - Measurement
KW  - Microelectronics
KW  - Holographic testing
KW  - Image processing
KW  - Digital techniques
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=697681
ER  -