Trends in nano- and micro-cavities [electronic resource] / edited by O'Dae Kwon, Byoungho Lee, Kyungwon An. - Hilversum, The Netherlands : Bentham Science Publishers, 2011. - viii, 321 p. : ill. Includes bibliographical references and index. ISBN: 9781608052363 Subjects--Topical Terms: Nanotechnology.Microelectromechanical systems. Index Terms--Genre/Form: Electronic books. LC Class. No.: T174.7 / .T74 2011