TY  - BOOK
AU  - Kwon,O'Dae
AU  - Lee,Byoungho
AU  - An,Kyungwon
ED  - ProQuest (Firm)
TI  - Trends in nano- and micro-cavities
SN  - 9781608052363
AV  - T174.7 .T74 2011
PY  - 2011///
CY  - Hilversum, The Netherlands
PB  - Bentham Science Publishers
KW  - Nanotechnology
KW  - Microelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=864167
ER  -