TY  - BOOK
AU  - Osten,Wolfgang
AU  - Reingand,Nadya
ED  - ProQuest (Firm)
TI  - Optical imaging and metrology: advanced technologies 
AV  - QC88 .O68 2012
PY  - 2012///
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Metrology
KW  - Intrinsic optical imaging
KW  - Electronic books
N1  - Includes bibliographical references and index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=947916
ER  -