@book{288599,
	author = {Wong, Terence K. S. and ProQuest (Firm)},
	title = {Semiconductor strain metrology},
	publisher = {Bentham Science,},
	year = {[2012]},
	address = {[Saif Zone, Sharjah, U.A.E] ;},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=976639}
}