@book{296633,
	author = {Kim, Seong H. and ProQuest (Firm)},
	title = {Adhesion aspects in MEMS/NEMS},
	publisher = {VSP,},
	year = {2010.},
	address = {Leiden [Netherlands] ;},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1109848}
}