TY - BOOK AU - Kim,Seong H. AU - Dugger,M.T. AU - Mittal,K.L. ED - ProQuest (Firm) TI - Adhesion aspects in MEMS/NEMS AV - TK7875 .A34 2010 U1 - 621.381 22 PY - 2010/// CY - Leiden [Netherlands], Boston PB - VSP KW - Microelectromechanical systems KW - Nanoelectromechanical systems KW - Adhesion KW - Surfaces (Technology) KW - Electronic books N1 - Includes bibliographical references; pt. 1. Understanding through continuum theory -- pt. 2. Computer simulation of interfaces -- pt. 3. Adhesion and friction measurements -- pt. 4. Adhesion in practical applications -- pt. 5. Adhesion mitigation strategies; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries UR - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1109848 ER -