@book{297635,
	author = {Claverie, A. and ProQuest (Firm)},
	title = {Transmission electron microscopy in micro-nanoelectronics},
	publisher = {John Wiley &Sons, Inc., ;},
	year = {2013.},
	series = {Nanoscience and nanotechnology series},
	address = {Hoboken, N.J. :},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1117321}
}