Transmission electron microscopy in micro-nanoelectronics  [electronic resource] / 
edited by Alain Claverie. 
 - Hoboken, N.J. :  London :  John Wiley &Sons, Inc., ;  ISTE,  2013. 
 - xiii, 243 p. :  ill. 
 - Nanoscience and nanotechnology series .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
<br/><br/><label>ISBN: </label>9781118579039 (electronic bk.) 
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Transmission electron microscopy.<br/>Nanoelectronics.<br/>Nanotechnology.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>QH212.T7  / T73 2013