@book{299593,
	author = {Tiec, Yannick Le. and ProQuest (Firm)},
	title = {Chemistry in microelectronics},
	publisher = {ISTE,},
	year = {2013.},
	series = {Electronics engineering series},
	address = {London :},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1138976}
}