Chemistry in microelectronics [electronic resource] / edited by Yannick Le Tiec. - London : ISTE, 2013. - xii, 372 p. : ill. - Electronics engineering series .

Includes bibliographical references and index.


Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

9781118580141 (electronic bk.)




Microelectronics.
Electronics--Materials.


Electronic books.

TK7874 / .C44 2013