Chemistry in microelectronics [electronic resource] /
edited by Yannick Le Tiec.
- London : ISTE, 2013.
- xii, 372 p. : ill.
- Electronics engineering series .
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.