01876nam a2200385 a 4500001001100000003000700011005001700018006001900035007001500054008004100069010001700110020002900127020002600156020003500182035002300217035002400240035002500264035002300289035002100312040002700333050002400360082002000384245008600404260005300490300003600543500009500579504005100674520043700725533014701162650002201309655002201331700002001353710002001373856009701393EBC1143629MiAaPQ20250821124337.0m     o  d |      cr cn|||||||||101013s2011    enka    sb    001 0 eng d  z  2010040731  z9781848212022 (hardback)  z184821202X (hardback)  a9781118621233 (electronic bk.)  a(MiAaPQ)EBC1143629  a(Au-PeEL)EBL1143629  a(CaPaEBR)ebr10671590  a(CaONFJC)MIL462802  a(OCoLC)830161630  aMiAaPQcMiAaPQdMiAaPQ 4aTK7872.M3bL58 201104a621.3815/3122200aLithographyh[electronic resource] :bmain techniques /cedited by Stefan Landis.  aLondon :bISTE ;aHoboken, N.J. :bWiley,c2011.  axxv, 377 p. :bill. (some col.)  aAdapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.  aIncludes bibliographical references and index.  a"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--cProvided by publisher.  aElectronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 0aMicrolithography. 4aElectronic books.1 aLandis, Stefan.2 aProQuest (Firm)40uhttps://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1143629zClick to View