Lee, Yen-Min, <br/><br/>
Efficient extreme ultraviolet mirror design :  an FDTD approach / 
Yen-Min Lee. 
 - First edition. 
 - 1 online resource (112 pages) :  illustrations. 
 - IOP Series in Advances in Optics, Photonics and Optoelectronics Series .
 - IOP series in advances in optics, photonics and optoelectronics. .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>9780750343893 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Extreme ultraviolet lithography.<br/>Optics and photonics.<br/>Time-domain analysis.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7872.M3  / .L44 2021 
<br/><br/><label>Dewey Class. No.: </label>621.381531