TY  - BOOK
AU  - Lee,Yen-Min
TI  - Efficient extreme ultraviolet mirror design: an FDTD approach 
T2  - IOP Series in Advances in Optics, Photonics and Optoelectronics Series
AV  - TK7872.M3 .L44 2021
U1  - 621.381531 23
PY  - 2021///]
CY  - Bristol, England
PB  - IOP Publishing Ltd
KW  - Extreme ultraviolet lithography
KW  - Optics and photonics
KW  - Time-domain analysis
KW  - Electronic books
N1  - Includes bibliographical references
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=31252842
ER  -