Larsson, Karin, <br/><br/>
Chemical vapour deposition :  growth processes on an atomic level / 
Karin Larsson. 
 - First edition. 
 - 1 online resource (416 pages). 
 - IOP Ebooks Series .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>9780750344203 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemical vapor deposition.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TS695  / .L377 2022 
<br/><br/><label>Dewey Class. No.: </label>621.38152