TY  - BOOK
AU  - Larsson,Karin
TI  - Chemical vapour deposition: growth processes on an atomic level 
T2  - IOP Ebooks Series
AV  - TS695 .L377 2022
U1  - 621.38152 23
PY  - 2022///]
CY  - Bristol, England
PB  - IOP Publishing
KW  - Chemical vapor deposition
KW  - Electronic books
N1  - Includes bibliographical references
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=31252852
ER  -