@book{484509,
	author = {Liu, Changhui,},
	title = {Material science and MEMS production :},
	publisher = {TTP,},
	year = {2014.},
	series = {Advanced Materials Research,},
	address = {Zurich, Switzerland :},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1910744}
}