Material science and MEMS production :  selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / 
edited by Changhui Liu. 
 - 1 online resource (117 pages) :  illustrations (some color), graphs, photographs. 
 - Advanced Materials Research,  Volume 901  1662-8985 ; .
 - Advanced materials research ;  Volume 901. .
<br/><br/>Includes bibliographical references at the end of each chapters and indexes. 
<br/><br/><label>ISBN: </label>9783038264286 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses.<br/>Nanotechnology--Congresses.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M384 2014 
<br/><br/><label>Dewey Class. No.: </label>621.381