TY  - BOOK
AU  - Liu,Changhui
TI  - Material science and MEMS production: selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China 
T2  - Advanced Materials Research,
AV  - TK7875 .M384 2014
U1  - 621.381 23
PY  - 2014///
CY  - Zurich, Switzerland
PB  - TTP
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Nanotechnology
KW  - Electronic books
N1  - Includes bibliographical references at the end of each chapters and indexes
UR  - https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1910744
ER  -