@book{484529,
	author = {Tang, Fei, and International Conference of the Chinese Society of Micro-Nano Technology},
	title = {Micro-nano technology XV :},
	publisher = {TTP,},
	year = {2014.},
	series = {Key Engineering Materials,},
	address = {Durnten, Switzerland ;},
	url = {https://ebookcentral.proquest.com/lib/kuct-ebooks/detail.action?docID=1910769}
}