Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.
Material type:
TextSeries: Advanced materials research ; Volume 901.Publisher: Zurich, Switzerland : TTP, 2014Copyright date: 2014Description: 1 online resource (117 pages) : illustrations (some color), graphs, photographsContent type: - text
- computer
- online resource
- 9783038264286
- 621.381 23
- TK7875 .M384 2014
Includes bibliographical references at the end of each chapters and indexes.
Description based on online resource; title from PDF title page (ebrary, viewed March 20, 2014).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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