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Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.

Contributor(s): Material type: TextTextSeries: Advanced micro & nanosystemsPublication details: Weinheim : Wiley-VCH, 2013.Description: xx, 303 p. : illISBN:
  • 9783527675036
Subject(s): Genre/Form: DDC classification:
  • 539.60113 23
LOC classification:
  • TK7875 .R45 2013
Online resources:
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First edition 2007.

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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