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Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.

Contributor(s): Material type: TextTextSeries: Wiley microsystem and nanotechnology seriesPublication details: Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011.Description: xxii, 205 p. : ill., portISBN:
  • 9781119997306
Subject(s): Genre/Form: DDC classification:
  • 621.381 22
LOC classification:
  • TK7875 .D54 2011
Online resources:
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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