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Semiconductor strain metrology [electronic resource] : principles and applications / Terence K.S. Wong.

By: Contributor(s): Material type: TextTextPublication details: [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]Description: 136 p. : illISBN:
  • 9781608053599
Subject(s): Genre/Form: LOC classification:
  • TK7871.85 .W65 2012
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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2018. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.

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